| AG5 series | 
|---|
| ACCURACY | AG5-1620 | AG5-3220 | |
|---|---|---|---|
| Positioning accuracy ( JIS B 6338 ) | ± 0.010 mm / Full Travel | ||
| Positioning accuracy ( VDI 3441 )  | 
                        X-axis | P = 0.016 / Full Travel | P = 0.025 / Full Travel | 
| Y-axis | P = 0.020 mm / Full Travel | ||
| Z-axis | P = 0.016 mm / Full Travel | ||
| Repeatability ( JIS B 6338 ) | ± 0.003 mm / Full Travel | ||
| Repeatability ( VDI 3441 )  | 
                        X-axis | Ps = 0.012 mm | Ps = 0.018 mm | 
| Y-axis | Ps = 0.015 mm | ||
| Z-axis | Ps = 0.012 mm | ||
Specications are subject to change without notice.